| 摘要 |
PROBLEM TO BE SOLVED: To apply pressure on an object with high accuracy via a piston rod driven by fluid pressure. SOLUTION: A piston 15 is incorporated in a cylinder body 12 reciprocatingly and a piston rod 11 is supported to the piston 15 reciprocatingly. The leading end of the piston rod 11 projects outwardly from the cylinder body 12. The piston 15 and a diaphragm 33 for pressurizing define a pressurizing chamber 42, and the piston 15, the piston rod 11, a diaphragm 31 for balancing, and a diaphragm 32 for blocking define a balancing pressure chamber 34. The piston rod 11 is pressed in an advancing direction by supplying fluid pressure P3 to the chamber 42 in a state that thrust in a retreat direction is generated in the piston rod 11 by supplying fluid pressure P4 to the chamber 34, and gravity applied on the piston rod 11 is offset. COPYRIGHT: (C)2004,JPO
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