ELECTROSTATIC CHUCK AND LAMINATION DEVICE FOR FLAT PANEL SUBSTRATE USING IT

摘要

PROBLEM TO BE SOLVED: To surely switch the suction holding of a substrate by a suction force to the attraction holding of the substrate by a electrostatic attraction force while simplifying a structure, and to laminate it. SOLUTION: Both substrates A, B or either thereof is sucked and held by a suction means 3' and is attracted in the air by an electrostatic chuck 3 before the suction force by the suction means 3' disappears in a process proceeding decompression. After a prescribed vacuum degree is attained, both the substrates A, B are laminated. COPYRIGHT: (C)2004,JPO