COPOLYMER HAVING ALCOHOLIC HYDROXY GROUP AND AROMATIC RING IN THE SAME RECURRING UNIT, AND HAVING LEAVING GROUP BY PROTON

摘要

PROBLEM TO BE SOLVED: To provide a copolymer exhibiting a high-level characteristics such as change in solubility in an alkaline aqueous solution before and after treatment with a free proton, adhesiveness to a substrate, developability, chemical resistance and etching resistance, suitably applicable to various applications and having a leaving group by a proton.

SOLUTION: The copolymer has not only an alcoholic hydroxy group and an aromatic ring, but also a leaving group by a proton. The copolymer having the leaving group by the proton contains a repeating unit having both of the alcoholic hydroxy group and the aromatic ring as an essential component.

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