| 摘要 |
PROBLEM TO BE SOLVED: To prevent occurrence of dislocation with a holder even if a movable table is forced and deformed. SOLUTION: A device is provided with the holder WH holding a wafer W and a movable table TB supporting moving the holder WH. A support plate 5 having elastic hinges 7 is inserted between the holder WH and the movable table TB. COPYRIGHT: (C)2004,JPO |
