| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure sensor miniaturizable structurally, and high in detecting accuracy by improving a diaphragm acting as a liquid pressure sensing part. SOLUTION: This capacitance type diaphragm pressure sensor for detecting liquid pressure, has a pressure detecting member 10 having a pressure receiving part 10a including the oppositely arranged diaphragms 20a and 20b formed in a paper strip shape, and vapor deposition electrodes 22a and 22b respectively formed on the opposed sides of the diaphragms, and a housing member 11 manufactured by a material having corrosion resistance to a detecting liquid, and housing the pressure receiving part of the pressure detecting member; and is constituted so that the detecting liquid pressure is transmitted to the pressure receiving part via the housing member by soaking the housing member in the detecting liquid, and capacitance is changed by a change in a clearance distance of the oppositely arranged diaphragms. COPYRIGHT: (C)2004,JPO
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