DEFECT INSPECTION APPARATUS AND DEFECT INSPECTION METHOD USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a defect inspection apparatus and a defect inspection method using it which accurately find the number of defects on inspected materials when quality of the inspected materials is determined based on defect information of the inspected materials respectively detected by a plurality of defect detectors and determine the quality of the inspected materials based on the number of the defects. SOLUTION: The defect inspection apparatus is provided with a plurality of the defect detectors and a discriminator for discriminating whether the defects respectively detected by the defect detectors are the same by comparing and verifying the defect information of the inspected materials sent from the defect detectors. The defect inspection method uses the defect inspection apparatus and discriminates whether the defects respectively detected by the defect detectors are the same by comparing and verifying the defect information of the inspected materials sent from defect detectors. COPYRIGHT: (C)2004,JPO