| 摘要 |
PROBLEM TO BE SOLVED: To more surely photograph position detecting marks of substrates by an image pickup device. SOLUTION: This substrate laminating apparatus 10 has an upper stage 21 for holding an upper glass substrate 1 and a lower stage 22 for holding a lower glass substrate 2, and which laminates together the upper glass substrate 1 and the lower glass substrate 2 in a condition that both of the substrate are positioned relative to each other and has the image pickup device 40 that photographs position detecting marks on the upper and lower glass substrates 1, 2, a moving device 52 that changes a relative distance between the image pickup device 40 and the upper/lower glass substrates 1, 2, a means for calculating data regarding the relative distance of the upper/lower glass substrate 1, 2 and the image pickup device 40 and a control device that controls the moving device 52 based on the data about the relative distance. COPYRIGHT: (C)2004,JPO
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