| 摘要 |
PROBLEM TO BE SOLVED: To reduce the phase-shift error quantity when measuring the shape of a cylindrical article to be measured such as a roller part by applying a phase shift method. SOLUTION: The cylindrical article to 1 is rotated, and moire fringes having a specific fringe order are shifted accurately as much as a desired phase, and a measuring region is limited near the fringe order, and the shape is measured from phase-shifted moire fringe data acquired by a two-dimensional area sensor 13. At that time, a spot image 24 of spot light 23 is projected onto an area where the moire fringes of the same image as the phase-shifted moire fringe data are not generated, and the position change of the cylindrical article to be measured 1 is detected from the position of the spot image 24, and the position relation between the two-dimensional area sensor 13 and the cylindrical article to be measured 1 is fixed. COPYRIGHT: (C)2004,JPO
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