| 摘要 |
PROBLEM TO BE SOLVED: To make graspable three-dimensionally the size of a sample, and to measure more accurately the size of the sample than the case of measurement by using a conventional caliper. SOLUTION: The sample W placed on a rotary table 1 is irradiated with a laser slit beam 3a from a laser beam projector 3. A reflected beam is taken with a CCD camera 4, and imaging information thereof is transferred to an image processing means 5 and converted into distance information. The distance information is transferred again to a control means 6, subjected to operation conversion into three-dimensional distance information of the sample W, and displayed by a display means 7. While the sample W placed on the rotary table 1 is rotated at a prescribed angle at a time, the three-dimensional distance information of the sample is acquired following the above-mentioned procedure, and this operation is performed over 360 degrees relative to the sample, to thereby grasp accurately the irregularity size on the side of the sample. COPYRIGHT: (C)2004,JPO
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