| 摘要 |
PROBLEM TO BE SOLVED: To solve the problems that an article used as a measurement reference is required to be carried in a device or separately, and that the article is large and very expensive and must be managed and stored, while keeping its accuracy, and that movement is required in order to perform both measurement of the reference article and measurement of a surface to be measured, to thereby deteriorate remarkably the measurement accuracy. SOLUTION: The flatness and the surface shape are determined by using a mechanism for moving in parallel with the measuring surface, a measuring device having a measurement criterion inside the device capable of calculating a deflection/shape change caused by the self-weight or exerting no influence on the measurement accuracy, for measuring the reference surface, distance information to the measuring surface or the reference surface, the deflection quantity caused by the self-weight of the reference surface determined by calculation, and the horizontal direction moving quantity to the measuring surface. A wire rod having a small sectional area or a thin plate material is used as the reference article for measurement and stored compactly inside the device. COPYRIGHT: (C)2004,JPO
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