SUBSTRATE TRANSFER APPARATUS OF SEMICONDUCTOR MANUFACTURING EQUIPMENT

摘要

PURPOSE: A substrate transfer apparatus of semiconductor manufacturing equipment is provided to be capable of previously preventing the damage of a substrate by checking the start position of a transfer robot. CONSTITUTION: A substrate transfer apparatus(200) is provided with a base(210) driven by a rotating shaft, a robot arm part(250) located at the upper portion of the base for transferring a substrate by carrying out a rotating motion and a linear motion, a hand(260) located at the front portion of the robot arm part for stably loading the substrate, and a sensing part(270) for checking the reference position of the hand before transferring the substrate. Preferably, the sensing part includes a sensor(272) installed at the hand and a reference position reflector(274) installed at the predetermined height corresponding to the reference position of the hand.