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发明名称
Hydrazinaddukt von Dialkylgalliumazid als molekulare Vorstufe für Gasphasenabscheidung von GaN
摘要
申请公布号
DE60001871(T2)
申请公布日期
2003.11.13
申请号
DE20006001871T
申请日期
2000.06.14
申请人
KOREA RESEARCH INSTITUTE OF CHEMICAL TECHNOLOGY, DAEJEON
发明人
KIM, YUN-SOO;KIM, CHANG-GYOUN;YU, SEUNG-HO
分类号
C07F5/00;C23C16/34;C30B25/02;H01L21/205;H01L33/32;(IPC1-7):C07F5/00
主分类号
C07F5/00
代理机构
代理人
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地址
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