发明名称 MEMS device wafer-level package
摘要 A method and system in which a semiconductor wafer having a plurality of dies is inspected through a visual inspection and/or an electrical test. If certain of the dies on the wafer pass the inspection, then windows are mounted or affixed above those certain dies while they are still a part of the wafer.
申请公布号 US2003211654(A1) 申请公布日期 2003.11.13
申请号 US20020135559 申请日期 2002.04.29
申请人 TEXAS INSTRUMENTS INC. 发明人 KOCIAN THOMAS A.;KNIPE RICHARD L.;STRUMPELL MARK H.
分类号 B81C99/00;(IPC1-7):H01L21/44 主分类号 B81C99/00
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