BASE PLATE TRANSFER INSTRUMENT AND BASE PLATE TRANSFER METHOD USING THE SAME

摘要

PURPOSE: A base plate transfer instrument and base plate transfer method using the same are provided to be capable of carrying the vibration isolating pedestal in and out without disassembling peripheral semiconductor manufacturing equipment. CONSTITUTION: A base plate transfer instrument(100) is provided with a support frame(110) having a plurality of wheels(115), the first and second fixing part(130,150) installed at one and the other end portion of the support frame for supporting a vibration isolating pedestal(200), and a detachable supporting part(170) installed at the predetermined portion of the support frame between the first and second fixing part.