TRAJECTORY PLANNING AND MOTION CONTROL STRATEGIES FOR A PLANAR THREE-DEGREE-OF-FREEDOM ROBOTIC ARM

摘要

A method for moving a substrate (24) to a predetermined location with a specified orientation with a robotic manipulator (11), the robotic manipulator (11) having a plurality of joint actuators and an end-effector (16) for independently rotatable with respect to the remaining robotic manipulator (11). The method comprises selecting a reference point (26) on the end-effector (16), wherein the reference point (26) is offset from a wrist of the robotic manipulator (11), determining a motion path for movement of the end-effector (16) of robotic arm toward predetermined location with specified orientation, and generation motion profiles for translational and rotational components of movement of the end-effector (16) of robotic manipulator (11) along the motion path. The motion profiles are converted into joint motion profiles for each of the joint actuators of the robotic manipulator (11) for implementing the movement of the end-effector (16) to predetermined location with the specified orientation.