发明名称 |
PROTECTION OF WORK PIECE DURING SURFACE PROCESSING |
摘要 |
The present invention provides an apparatus and method for protecting a work piece during surface processing. The apparatus employs a protective material to protect a wafer during backside grinding. The apparatus can further include a vacuum chuck that allows the passage of a vacuum signal, a frame holding the protective material, a frame holder to hold the frame, and a fastening arrangement to fasten the frame holder to the chuck adjacent a support surface. The method provided by the invention can include providing a vacuum chuck, placing a protective material in contact with the chuck, placing a wafer in contact with the protective material, applying a vacuum signal securing the wafer with the chuck, and grinding the backside surface of the wafer.
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申请公布号 |
US2003211813(A1) |
申请公布日期 |
2003.11.13 |
申请号 |
US20030249433 |
申请日期 |
2003.04.08 |
申请人 |
STRASBAUGH, INC., A CALIFORNIA CORPORATION |
发明人 |
KASSIR SALMAN MOUDREK;SPIEGEL LARRY A. |
分类号 |
B24B1/00;B23B31/30;B24B37/04;B24B41/06;H01L21/304;H01L21/683;(IPC1-7):B24B1/00;B24B7/19;B24B7/30 |
主分类号 |
B24B1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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