Analyzing covered layers close to surface comprises exciting surface of sample to be analyzed with X-rays of two different energies, and separately measuring photoelectrons emitted and layer composition

摘要

Analyzing covered layers close to the surface comprises exciting the surface of the sample to be analyzed with X-rays of two different energies, separately measuring the photoelectrons emitted, and determining the layer composition from the measured values. An Independent claim is also included for an apparatus for carrying out the process comprising a twin anode (17) having a first anode surface (A1) with a first element coating and a second anode surface (A2) with a second element coating, and a photoelectron detector having an evaluation unit.