| 摘要 |
Methods and apparatus for controlling power supplied to vapor jet vacuum pum ps are provided. A vapor jet vacuum pumping system includes a vapor jet pump having an inlet port, an exhaust port, a jet assembly and a boiler (12), the boiler including a heater (50), and a power controller for automatically controlling power supplied to the heater in response to at least one control parameter. The power may be controlled in response to a programmed sequence, to a sensed pressure in a process chamber, to control signals from a process control system, or to combinations of these control parameters.
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