| 摘要 |
<p>A method including: providing a coherence profile and a phase profile derived from interferometry data for a test surface (120); calculating a phase gap map (130), wherein the phase gap map is related to a difference between the coherence profile and the phase profile; fitting an expression including a term based on the coherence profile to the phase gap map (140); and determining a height profile (170) for the test surface using information derived from the fit.</p> |
