| 摘要 |
<p>A plurality of latches are employed for detachably holding a semiconductor wafer to a ring support during processing. Each latch is rotatably mounted on a post which is secured to the support so that the latch can freely engage and disengage the wafer, alternately clamping and releasing the wafer to and from the support. Each latch has two opposed rollers, one to engage and disengage the wafer and the other to engage the support. The support has two pairs of opposed recess dimples such that each roller of a latch is in registration with a corresponding one of the opposed dimples of each pair when the latch is rotated to and between the wafer engaged and disengaged position. The dimple in registration with one roller, when the wafer is engaged, is sufficiently deep so that the other roller engaged with the wafer does not touch the support. In this position, the opposing dimple is dimensioned so that the one roller in registration therewith engages the bottom of the dimple. This tilts the latch while the other roller engages and clamps the wafer to the ring.</p> |
