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发明名称
FOTOEMPFINDLICHE HARZZUSAMMENSETZUNGEN, VERFAHREN ZUR HERSTELLUNG EINES HARZMUSTERS, DAMIT HERGESTELLTE ELEKTRONISCHE VORRICHTUNGEN UND VERFAHREN ZUR DEREN HERSTELLUNG
摘要
申请公布号
DE69813508(T2)
申请公布日期
2003.11.13
申请号
DE19986013508T
申请日期
1998.01.28
申请人
HITACHI CHEMICAL CO., LTD.
发明人
MAEKAWA, YASUNARI;MIWA, TAKAO;UENO, TAKUMI;OKABE, YOSHIAKI
分类号
G03F7/004;G03F7/012;G03F7/023;G03F7/038;G03F7/039;H01L21/312;(IPC1-7):G03F7/022;C08K5/29;C08K5/56;C08L79/08;G03F7/037;H01L21/027
主分类号
G03F7/004
代理机构
代理人
主权项
地址
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