| 摘要 |
A method of improving quality of an interface between a gate and a gate oxide layer is disclosed. The method begins by providing a substrate with a gate oxide layer formed thereon. A nitrogen containing plasma treatment is then performed on the gate oxide layer, so that a top surface of the gate oxide layer is reacted to form a silicon oxy-nitride layer. A polysilicon layer is formed on the silicon oxy-nitride layer and subsequently patterned to form a polysilicon gate.
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