| 发明名称 |
PLASMA DEVICE AND PLASMA GENERATING METHOD |
| 摘要 |
A plasma device includes a slot antenna (30) for supplying a high frequency electromagnetic field (F) supplied through a feeding part into a processing vessel (11). The feeding part has a cavity (35) for forming a resonator and converting the fed high frequency electromagnetic field (F) into a rotating electromagnetic field and supplying the rotating electromagnetic field to the slot antenna (30). <IMAGE>
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| 申请公布号 |
EP1361782(A1) |
申请公布日期 |
2003.11.12 |
| 申请号 |
EP20020715809 |
申请日期 |
2002.01.18 |
| 申请人 |
TOKYO ELECTRON LIMITED;ANDO, MAKOTO;TAKAHASHI, MASAHARU |
发明人 |
ANDO, MAKOTO;TAKAHASHI, MASAHARU;ISHII, NOBUO |
| 分类号 |
H01J37/32;H05H1/46;H01L21/205;H01L21/302;H01L21/3065;(IPC1-7):H05H1/46;H01L21/306 |
主分类号 |
H01J37/32 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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