PLASMA TREATMENT DEVICE AND PLASMA TREATMENT METHOD,申请号KR20037010433-传众专利搜索

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发明名称	PLASMA TREATMENT DEVICE AND PLASMA TREATMENT METHOD
摘要
申请公布号	KR20030086996(A)	申请公布日期	2003.11.12
申请号	KR20037010433	申请日期	2003.08.07
申请人		发明人
分类号	H01L21/3065;H05H1/46;B01J19/08;H01J37/32;H01L21/205;H01L21/285;H01L21/302;H01L21/306;H01L21/3213	主分类号	H01L21/3065
代理机构		代理人
主权项
地址

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