发明名称 |
MICROSENSOR AND SINGLE CHIP INTEGRATED MICROSENSOR SYSTEM |
摘要 |
A microsensor system, in particular gas sensor system, is integrated on a single chip and includes a microsensor, preferably a resistive-film-sensor configuration, with a microheater, the latter preferably of essentially round, elliptic or polygonal structure. The microsensor is located on a thermally insulated semiconductor structure, e.g. a thin membrane. Further included or integrated on the chip may be one or more first circuits for controlling the microheater and/or second circuits for evaluating or processing the measured values obtained from the microsensor. The first circuits may include power and/or temperature controller for the microheater. The second circuits may include an A/D converter, a digital signal processor, a digital output interface for processing sensor signals and transferring them to external devices, and/or potentiostats to regulate the electrode potential applied to the gas-sensitive layer. Also provided on a single chip may be a plurality of microsensors and microheaters with associated integrated circuits. The latter may then include multiplexing circuits for the sensor and the heater signals. |
申请公布号 |
EP1360478(A1) |
申请公布日期 |
2003.11.12 |
申请号 |
EP20010271538 |
申请日期 |
2001.12.11 |
申请人 |
EIDGENOESSISCHE TECHNISCHE HOCHSCHULE ZUERICH |
发明人 |
BALTES, HENRY;BARRETTINO, DIEGO;GRAF, MARKUS;HAGLEITNER, CHRISTOPH;HIERLEMANN, ANDREAS |
分类号 |
B81B3/00;G01N27/12;G01N33/00 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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