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发明名称
ACHROMATIC PHASE SHIFT DEVICE AND INTERFEROMETER USING ACHROMATIC PHASE SHIFT DEVICE
摘要
申请公布号
EP1210637(B1)
申请公布日期
2003.11.12
申请号
EP19990943475
申请日期
1999.09.08
申请人
NEDERLANDSE ORGANISATIE VOOR TOEGEPAST-NATUURWETENSCHAPPELIJK ONDERZOEK TNO
发明人
BRAAT, JOSEPHUS, JOHANNES, MARIA;BOKHOVE, HENRIK
分类号
G01B9/02;G02B5/04;G02B26/06;(IPC1-7):G02B26/06
主分类号
G01B9/02
代理机构
代理人
主权项
地址
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