| 摘要 |
PURPOSE: An integral type spectroscopic ellipsometry device is provided to simplify a structure of a spectroscopic ellipsometry device by accommodating all optical parts in a box type case. CONSTITUTION: An integral type spectroscopic ellipsometry device includes a box type case(114) having an opening. Light radiated from a light source section(100) is incident into a test sample(104) placed on one surface of the box type case(114) through a polarized light generator(102). Polarized light reflected from the test sample(104) is analyzed. Then, light is detected according to wavelength thereof. The detecting signal is transmitted into a computer(116) so as to analyze optical information of the test sample(104). The light source radiates light towards the polarized light generator(102). The polarized light generator(102) is rotated or modulated by means of a driving section. |
