MEMBRANE PROBING SYSTEM WITH LOCAL CONTACT SCRUB,申请号EP19970924735-传众专利搜索

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发明名称	MEMBRANE PROBING SYSTEM WITH LOCAL CONTACT SCRUB
摘要
申请公布号	EP0929819(B1)	申请公布日期	2003.11.12
申请号	EP19970924735	申请日期	1997.05.02
申请人	CASCADE MICROTECH, INC.	发明人	GLEASON, K., REED;SMITH, KENNETH, A.;BAYNE, MIKE
分类号	G01R31/26;G01R1/06;G01R1/067;G01R1/073;G01R31/02;G01R31/28;H01L21/66;(IPC1-7):G01R1/073	主分类号	G01R31/26
代理机构		代理人
主权项
地址

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