| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a thin film coating method which coats a substrate by lowering the spray density of a chemical liquid due to a nozzle in the peripheral edge of the substrate to apply a thin film uniform in thickness to the entire surface of the substrate, and to provide a control unit thereof. <P>SOLUTION: In a method for coating the surface of the substrate 2 with the thin film by relatively moving a nozzle 1 for spraying the chemical liquid and the substrate 2, the spray density to the surface of the substrate 2 of the chemical liquid is made low in the peripheral edges 2a-2d of the substrate 2 as compared with the center of the substrate 2. By this constitution, the build-up of the thin film from the peripheral edge end 2a of the substrate 2 to the peripheral edge and part 2d thereof is suppressed, and the film thickness of the thin film can be made uniform over the entire surface of the substrate 2. <P>COPYRIGHT: (C)2004,JPO |
