| 摘要 |
Systems and methods are presented for employing arrays of coupling strips to measure misalignment of layers of multilayer devices as a function of directional coupling between pairs of strips. Each array is capable of detecting misalignment only in the direction perpendicular to the axes of the coupling strips, although multiple arrays may be employed for measuring misalignment in more than one direction. Such arrays are easily manufactured onto existing multilayer devices, and may be excised from such devices after misalignment has been measured.
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