| 摘要 |
PROBLEM TO BE SOLVED: To provide a right-angle transfer equipment free from breakage of a substrate during transfer operation for changing orientation. SOLUTION: A lifting transfer table 40 and a substrate delivery mechanism 50 are provided at the cross point between two substrate delivery lines 20 and 30 which are crossed at right angle and have different heights. The substrate delivery mechanism 50 forms a delivery line, which continues from a delivery line 30 at the lower stand, using lower roller 51 and 52 separately located at the both ends of the line in a way not to interfere with the transfer table 40 going down. The transfer table 40 is bridged between a frame-type lifting frame 41 and side plates a the both ends of the lifting frame 41, has multiple delivery rollers 42 placed in the same direction as the delivery roller in the delivery line at the upper stand, forms a delivery line continuing from the delivery line 20 of the upper stand at the ascent position, and is positioned lower than the substrate supporting level of the lower rollers 51 and 52 so as to transfer the substrate 10. COPYRIGHT: (C)2004,JPO |
