| 摘要 |
A system for supplying Iodine gas to a laser cavity includes a cartridge for generating Iodine gas and delivery piping for transporting Iodine gas from the cartridge to the laser cavity. The cartridge includes a hollow, cylindrical casing having an open end. The casing contains a solid preheat material, a solid mixture containing Iodine, and a purge material. An ignitor squib is disposed in the casing near the open end to initiate a burn front. The burn front travels through the preheat material to generate hot gas for preheating the delivery piping, preventing Iodine gas condensation in the piping. Next, the burn front travels through the mixture containing Iodine to generate Iodine gas which flows through the preheated delivery piping to the laser cavity. The burn front then passes through the purge material generating a purge gas to remove any traces of corrosive Iodine gas from the delivery piping.
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