METHOD AND APPARATUS FOR FORMING PASTE BUMP

摘要

PROBLEM TO BE SOLVED: To provide a method and an apparatus for forming many paste bumps having small height unevenness. SOLUTION: A curvature guide 70 is interposed at the rear side of a squeegee member 60 of the upper surface side of a flexible screen mask 20 for rubbing conductive paste 80 into and filling the paste 80. Since the mask 20 pressed to the surface of a copper foil 3 by passing the member 60 is separated along the lower edge 72 of the guide 70, the mask 20 is separated along a predetermined curve always during the squeegee operation. As a result, the forming conditions of the many bumps 81 are made uniform to suppress the unevenness of the heights. COPYRIGHT: (C)2004,JPO