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发明名称
Micro electro-mechanical system apparatus and method
摘要
申请公布号
AU2003234772(A8)
申请公布日期
2003.11.11
申请号
AU20030234772
申请日期
2003.04.29
申请人
MOTOROLA, INC., A CORPORATION OF THE STATE OF DELAWARE
发明人
KRISHNA JONNALAGADDA;MANES ELIACIN;SPENCER A. LANE
分类号
B81B3/00;H01H59/00;(IPC1-7):B81B7/04;B81C5/00
主分类号
B81B3/00
代理机构
代理人
主权项
地址
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