| 摘要 |
A method for capacitively measuring the thickness of multi-layer films (10), the layers (32, 34) the dielectric constants of which differ at least at a particular temperature, wherein, in addition to the capacitive measurement, at least one further thickness measurement is carried out under different conditions, and wherein the thicknesses (d1, d2) of the individual layers is determined by comparing the measurement results and by means of the different dielectric constants.
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