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发明名称
Photoresist composition
摘要
Disclosed are new photoresist compositions including polymeric particles as binders and a photoactive component. Also disclosed are methods of forming relief images using these photoresist compositions.
申请公布号
US6645695(B2)
申请公布日期
2003.11.11
申请号
US20010948528
申请日期
2001.09.07
申请人
SHIPLEY COMPANY, L.L.C.
发明人
ZAMPINI ANTHONY
分类号
G03F7/004;G03F7/038;G03F7/039;(IPC1-7):G03F7/004
主分类号
G03F7/004
代理机构
代理人
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