| 摘要 |
PROBLEM TO BE SOLVED: To provide handling of flat panels, such as a liquid crystal display and a plasma display, without touching them during the production process of the panels so that high density of production will not cause scratches on and dust adherence to the panels, which lower the yield of production. SOLUTION: This retaining equipment has porous material for positive pressure and negative pressure, which are smaller than the surface plate unit in terms of gross area, in the surface plate of which a positive pressure room containing pressure relatively higher than outside pressure which discharges gas, and a negative pressure room using suction force constitute part of the panel retaining equipment. The retaining equipment discharge gas from porous material to balance the force to lift a flat panel and a force to attract a flat panel using the porous material for suction. The robot hand with the retaining equipment is capable of handling a flat panel horizontally, vertically, and obliquely with complete control. COPYRIGHT: (C)2004,JPO |
