发明名称 |
Electrical device having metal pad bonded with metal wiring and manufacturing method thereof |
摘要 |
A substrate has a first surface and a second surface. A plurality of pads is formed on the first surfaces. Each pads has a Cu plating layer and an Au plating layer that is directly formed on the Cu plating layer. Al wiring or Au wiring is bonded with the pads. The thickness of the Au plating layer that is bonded with the Al wiring is less than 0.5 mum. Thickness of the Au plating layer that is bonded with the Au wiring is 0.05 mum or more.
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申请公布号 |
US6645606(B2) |
申请公布日期 |
2003.11.11 |
申请号 |
US20020120527 |
申请日期 |
2002.04.12 |
申请人 |
DENSO CORPORATION |
发明人 |
NAKANO TETSUO;MAEDA YUKIHIRO;ASAI YASUTOMI;NAGASAKA TAKASHI |
分类号 |
C04B41/88;H01L21/60;H01L23/498;H01L23/538;H05K3/24;H05K3/32;(IPC1-7):B32B15/00;H01L23/48 |
主分类号 |
C04B41/88 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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