发明名称 Electrical device having metal pad bonded with metal wiring and manufacturing method thereof
摘要 A substrate has a first surface and a second surface. A plurality of pads is formed on the first surfaces. Each pads has a Cu plating layer and an Au plating layer that is directly formed on the Cu plating layer. Al wiring or Au wiring is bonded with the pads. The thickness of the Au plating layer that is bonded with the Al wiring is less than 0.5 mum. Thickness of the Au plating layer that is bonded with the Au wiring is 0.05 mum or more.
申请公布号 US6645606(B2) 申请公布日期 2003.11.11
申请号 US20020120527 申请日期 2002.04.12
申请人 DENSO CORPORATION 发明人 NAKANO TETSUO;MAEDA YUKIHIRO;ASAI YASUTOMI;NAGASAKA TAKASHI
分类号 C04B41/88;H01L21/60;H01L23/498;H01L23/538;H05K3/24;H05K3/32;(IPC1-7):B32B15/00;H01L23/48 主分类号 C04B41/88
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