| 摘要 |
PURPOSE: A test apparatus of a semiconductor device is provided to be capable of preventing measurement error and improving reliability by forming a contact sensor at a probe card. CONSTITUTION: A test apparatus is provided with a probe tip formed on a probe card and a contact sensor(13). The contact sensor(13) is formed at one side of the probe card for measuring contact state between a wafer(17) and the probe tip. The contact sensor(13) further includes a moving arm(15) and a fixed arm(16). The moving arm(15) is moved according to the contact state between the wafer and the probe tip. The fixed arm(16) is electrically connected with the moving arm(15) when the moving arm contacts to the wafer.
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