LOAD PORT, SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD THEREFOR, AND DETECTION METHOD OF ADAPTOR

摘要

PROBLEM TO BE SOLVED: To detect the presence or absence of an adaptor with a simple configuration without increasing the size of a semiconductor manufacturing apparatus. SOLUTION: A semiconductor wafer W whose size differs in the fitting and non-fitting of the adaptor 25 is accommodated in FOUPs 21a and 21b, and the FOUPs 21a and 21b are placed on load ports 11 and 12. The load ports 11 and 12 are arranged on the front of the semiconductor manufacturing apparatus 1, the lids of the FOUPs 21a and 21b are opened by an FOUP opener 14, and then the semiconductor wafer W accommodated in the FOUPs 21a and 21b is carried in the semiconductor manufacturing apparatus 1. An adaptor detection sensor 17 is arranged at the upper section of the FOUP opener 14 for detecting the presence or absence of the adaptor 25 in the FOUPs 21a and 21b. A result detected by the adaptor detection sensor 17 is informed to the control unit 5 of the semiconductor manufacturing apparatus 1. COPYRIGHT: (C)2004,JPO