| 摘要 |
PROBLEM TO BE SOLVED: To make characteristics of a multi-electron source uniform, equalize an electron emission volume from an element by aligning element characteristics having non-linear characteristics against voltage at any given voltage region, and make the multi-electron characteristics almost uniform in a simple process. SOLUTION: Against an electron source consisting of electron emission elements arrayed in matrix connected with each other by a plurality of line wirings and row wirings, electron emission characteristics of a plurality of elements are first measured. Later, based on the electron emission characteristics, an electron emission characteristics line is calculated, a slanting of the electron emission characteristics line is found as a first target value and a segment of the electron emission characteristics line is found as a second target value. Further, a characteristics adjustment is carried out through a process of impressing a characteristics shift voltage of a first step of aligning the slanting of the electron emission characteristics lines of a plurality of electron emission elements with the first target value and a second step of aligning the segments of the electron emission characteristics lines of a plurality of elements with the second target value. COPYRIGHT: (C)2004,JPO
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