发明名称 METHOD FOR MANUFACTURING COMPLEX GRATING MASKS HAVING PHASE SHIFTED REGIONS AND A HOLOGRAPHIC SET-UP FOR MAKING THE SAME
摘要 A method for manufacturing complex gratings masks having phase shifted regions and a holographic set-up for making the same are disclosed. The method, which can be easily automated, allows to produce arbitrary phase shift in holographically recorded gratings with high precision. In a preferred embodiment, the phase is controlled by a fringe locking system with a movable locking detector and a phase measuring device such as a camera for example, thereby allowing to provide a real-time phase locking and a real-time calibration of the set-up.
申请公布号 CA2428288(A1) 申请公布日期 2003.11.07
申请号 CA20032428288 申请日期 2003.05.06
申请人 TERAXION INC. 发明人 POULIN, MICHEL;TREPANIER, FRANCOIS
分类号 G03F1/26;G02B5/18 主分类号 G03F1/26
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