| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin film forming device which is capable of transferring a thin film formed on a sheet film onto a substrate by pressing the sheet film and the substrate uniformly against each other so as to obtain the thin film that is transferred onto the surface of the substrate and has a uniform thickness and a flat surface. SOLUTION: A second plate 5 is arranged on the back side of the sheet film so as to enable its top surface to bear freely against the back of the sheet film, and a sheet-like support member 9 is arranged on the under surface of the second plate 5. The support member 9 is formed of a sheet-like elastic member, and the second plate 5 is supported by the top surface center of the support member 9. The periphery of the support member 9 is connected to a pressing mechanism 10, and the second plate 5 is made to bear against the back of the sheet film F as pressed toward the substrate W corresponding to a fluid pressure given by the pressing mechanism 10. As mentioned above, the sheet film F is pressed against the substrate W by the use of a fluid pressure. COPYRIGHT: (C)2004,JPO
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