摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method for an EL (electroluminescence) element suppressing deterioration of characteristics of the device due to developer and photoresist solvent while holding advantages of photolithography such as light emitting efficiency, high taking out efficiency, simplicity of a manufacturing process, and a highly precise pattern formation. SOLUTION: This manufacturing method for the organic EL element is provided with, at least, a patterned organic light emitting layer. This manufacturing method for the organic EL element is characterized in that the patterning is performed by the photolithography using dry film resist. COPYRIGHT: (C)2004,JPO
|