| 摘要 |
PURPOSE: A mask is provided to be capable of effectively protecting damage of pattern due to electrostatic and improving productivity by using an electrostatic protection module. CONSTITUTION: A mask comprises a disc made of quartz or glass, a frame region(13), a main chip region(17) formed at inner side of a boundary outline(15), and a pair of electrostatic protection module(19,25). The first electrostatic protection module(19) is connected with two horizontal and vertical direction lines. The second electrostatic protection module(25) has a reverse polarity compared to the first electrostatic protection module and has a plurality of vacancy. The pair of first and second electrostatic protection modules(19,25) are arranged at the disc.
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