| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a diaphragm structure for an optoacoustic transducer capable of preventing an incident light or dust from entering and having high compliance. <P>SOLUTION: In the optoacoustic transducer, a light-emitting element and a light-receiving element are arranged on positions opposite to a reflection section 1a of a diaphragm 1 having a pressure-receiving surface, the diaphragm 1 is irradiated with a light from the light-emitting element, and the light reflected on the diaphragm 1 is received by the light-receiving element to detect the position of the diaphragm 1. In this transducer, a removing work consisting of a desired dimension and shape is applied to a desired position of the diaphragm 1 to form bottomed grooves 1c, 1d, 1f. <P>COPYRIGHT: (C)2004,JPO</p> |
