| 摘要 |
PROBLEM TO BE SOLVED: To provide an aligner which has a thin stage device and is suited to mass production. SOLUTION: Stationary guides 2, 3 and X sliders 4, 5 constitute air cylinders respectively, and the X sliders 4, 5 are driven on an X axis. A box-like guide bar guide bearing part 6 is fixed onto the X slider 5. A box-like guide bar drive part 8 is fixed onto the X slider 4. A guide bar 7 and the guide bar drive part 8 constitute an air cylinder, and the guide bar 7 is driven on a Y axis. A through hole 7a is formed in a Z direction near the center of the guide bar 7. Three piezoelectric elements 9a, 9b, 9c elastic in the Z direction are connected to three positions of a side wall of the through hole 7a directing above the Z direction. A table part 10 is mounted at upper ends of the piezoelectric elements 9a, 9b, 9c. COPYRIGHT: (C)2004,JPO
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