| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a stamper for making optical recording media capable of transferring fine rugged patterns on the stamper and of manufacturing the stamper having the fine rugged patterns by preventing the failure of the rugged patterns of the stamper in peeling the stamper from a master disk. SOLUTION: In manufacturing the stamper for making the optical recording media, the stamper 15 is formed by forming photoresist having the rugged patterns by development after the exposure of the photoresist formed on a substrate, subjecting the substrate 11 to anisotropic etching with the photoresist as a mask to form the rugged patterns 11A on the substrate 11, forming a buffer film 13 consisting of a material having the hardness lower than that of the stamper 15 so as to cover the surface of the substrate 11 formed with the rugged patterns 11A, forming the material of the stamper 15 on this buffer film 13, and peeling the material of the stamper 15 from the buffer film 13. COPYRIGHT: (C)2004,JPO
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