| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an apparatus and a method for metal pattern formation and a method for manufacturing a device which can improve productivity by decreasing manufacturing processes and reducing manufacturing costs. <P>SOLUTION: The metal pattern forming apparatus has a discharging device 200 which discharges a discharged body containing metal particulates to a substrate 700, a drying and burning device 300 which dries and burns the discharged body discharged to the substrate, and a metal plating processing device 500 which performs metal plating processing for the substrate having the discharged body formed in the dried and burnt state. <P>COPYRIGHT: (C)2004,JPO |
