| 摘要 |
<P>PROBLEM TO BE SOLVED: To efficiently apply plasma treatment to only specific portions of a treated body such as a fundamental material. <P>SOLUTION: This method generates glow discharge plasma to treat the base material F by applying an electric field to the interior of a counter electrode 2 having a pair of electrodes 21, 22 counter to each other at a prescribed interval and having a solid dielectric disposed on at least one electrode counter face of the electrodes 21, 22, with the base material F disposed in the interior of the counter electrode 2. Projecting parts 211, 212 are formed in the electrode counter face of at least one electrode 21 of the counter electrode 2, and the glow discharge plasma is locally generated to apply the plasma treatment to the specific portions of the treated body such as the base material F. <P>COPYRIGHT: (C)2004,JPO |
